Exploratory approaches to the study of acid diffusion and acid loss from polymer films using absorption and fluorescence spectroscopy

Chris A. Coenjarts; James F. Cameron; Nicole Deschamps; David Hambly; Gerd Pohlers; Juan C. Scaiano; Roger F. Sinta; Susan Virdee; Anthony Zampini

doi:10.1117/12.350157

11 June 1999 Exploratory approaches to the study of acid diffusion and acid loss from polymer films using absorption and fluorescence spectroscopy

Chris A. Coenjarts, James F. Cameron, Nicole Deschamps, David Hambly, Gerd Pohlers, Juan C. Scaiano, Roger F. Sinta, Susan Virdee, Anthony Zampini

Author Affiliations +

Proceedings Volume 3678, Advances in Resist Technology and Processing XVI; (1999) https://doi.org/10.1117/12.350157
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

As the feature size in microlithography decreases in response to the demand for increasing miniaturization, problems related to acid diffusion and acid loss become more important. In an attempt to address these issues, we have examined various techniques based on absorption and fluorescence spectroscopy. We have synthesized, or developed for applications in this field a range od dyes where their absorption and fluorescence change dramatically as a result of acid-induced changes in their prototropic forms. These dyes represent the basis for an in situ method for quantifying acid in films. Approaches for monitoring acid movement into/out of films have been developed and rate constants for acid loss from poly(vinylphenol) films of various acids at different temperatures have been determined. In an approach to measure acid diffusion, we make use of the fact that fluorescent patterns produced by contact printing of polymer films containing a dye can be readily resolved by fluorescence microscopy and that diffusion leads to deterioration of these images. In yet another approach, we have used laser photolysis techniques with nanosecond-microsecond resolution to generate acid photochemically and monitor on short time scales its arrival to dye-containing sites within the polymer films. The advantages and disadvantages of each technique will be discussed, as well as the role of acid, polymer Tg and temperature on acid diffusion/loss.

Citation Download Citation

Chris A. Coenjarts, James F. Cameron, Nicole Deschamps, David Hambly, Gerd Pohlers, Juan C. Scaiano, Roger F. Sinta, Susan Virdee, and Anthony Zampini "Exploratory approaches to the study of acid diffusion and acid loss from polymer films using absorption and fluorescence spectroscopy", Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); https://doi.org/10.1117/12.350157

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available