Lithography performance indicator (LPI) and a new lumped parameter to derive resist images from aerial images

Burn Jeng Lin

doi:10.1117/12.350828

14 June 1999 Lithography performance indicator (LPI) and a new lumped parameter to derive resist images from aerial images

Burn Jeng Lin

Author Affiliations +

Proceedings Volume 3677, Metrology, Inspection, and Process Control for Microlithography XIII; (1999) https://doi.org/10.1117/12.350828
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

The imaging performance of an optical imaging system is difficult to quantify, even more so, to compare between different situations or systems. Though there exists physical parameters such as the contrast of the aerial image, the log slope of image intensity, the aberration coefficients of the imaging lens, the condenser apertures, the resist dissolution contrast, diffusion constant, resist processing parameters, and many others to define an imaging systems, there are too many of them. It is desirable to have a single figure of merit to compare the performance implication of these parameters, to monitor and document the performance of a manufacturing line. This paper presents the linewidth-derived (gamma) (LWD-(gamma) ) and LWD-(eta) as single-figure lithography performance indicators. In addition to the need to quantify lithography performance universally, there is also a need to quickly convert a given aerial image to its resist image. We introduce LWD-(gamma) to replace the conventional resist-development-based-(gamma) as a better parameter for use in the lumped parameter equations. We also introduce LWD-(beta) to replace LWD-(gamma) in low k₁ situations.

Citation Download Citation

Burn Jeng Lin "Lithography performance indicator (LPI) and a new lumped parameter to derive resist images from aerial images", Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); https://doi.org/10.1117/12.350828

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available