Automatic in-situ focus monitor using line-shortening effect

Young-Chang Kim; Gisung Yeo; Jae-Han Lee; Hak Kim; U-In Chung

doi:10.1117/12.350806

14 June 1999 Automatic in-situ focus monitor using line-shortening effect

Young-Chang Kim, Gisung Yeo, Jae-Han Lee, Hak Kim, U-In Chung

Proceedings Volume 3677, Metrology, Inspection, and Process Control for Microlithography XIII; (1999) https://doi.org/10.1117/12.350806
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

A new focus monitoring method, AIFM has been developed. Specially designed box-in-box was drawn on conventional Cr binary mask and investigate. The box-in-box were drawn to enlarge the line end shortening effect in this new method. There is a lateral shift between inner and outer box in printed feature, and it can be measured quickly at a number of locations across the field and across the wafer with a common overlay measurement system. AIFM provides a means of evaluating focus effects such as field curvature, astigmatism, and field tilt like other focus measurement method. This method has another advantage of in-situ process condition monitoring by drawing focus monitor patterns in real product masks. Experiments were performed to evaluate the effects of pattern geometry and exposure dose on the sensitivity of the focus monitor. AIFM data shows good correlation with conventional focus measurement using SEM line width measurement.

Citation Download Citation

Young-Chang Kim, Gisung Yeo, Jae-Han Lee, Hak Kim, and U-In Chung "Automatic in-situ focus monitor using line-shortening effect", Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); https://doi.org/10.1117/12.350806

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available