Regular microfilters based on PTFE

Vladimir Nazmov; Valery F. Pindyurin; Lubov A. Mezentseva; B. V. Mchedlishvili; Alexander I. Vilensky

doi:10.1117/12.351151

25 June 1999 Regular microfilters based on PTFE

Vladimir Nazmov, Valery F. Pindyurin, Lubov A. Mezentseva, B. V. Mchedlishvili, Alexander I. Vilensky

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351151
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

The phenomenon of anisotropic ablation of PTFE under SR is studied. Heat conductivity and melting point of PTFE came down under irradiation. The possibility of SR-assisted formation of regular microporous membranes with average diameter of 0,5 micrometers of the pores in PTFE films is investigated.

Citation Download Citation

Vladimir Nazmov, Valery F. Pindyurin, Lubov A. Mezentseva, B. V. Mchedlishvili, and Alexander I. Vilensky "Regular microfilters based on PTFE", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351151

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