Predicting mechanical distortions in x-ray masks

Eric P. Cotte; Roxann L. Engelstad; Edward G. Lovell; Cameron J. Brooks

doi:10.1117/12.351116

25 June 1999 Predicting mechanical distortions in x-ray masks

Eric P. Cotte, Roxann L. Engelstad, Edward G. Lovell, Cameron J. Brooks

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351116
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

The development of a low distortion mask is essential for advanced lithographic technologies to meet the allotted error budgets for sub-130 nm regimes. Predicting mask- related distortions is the first step in the design and optimization process. This paper presents the result of simulating mechanical distortions induced in the x-ray mask during fabrication and pattern transfer. Finite element (FE) models have been used to predict the out-of-plane distortions for the fabrication of the mask blank. Numerical data are in excellent agreement with experimental data. In- plane distortions due to the pattern transfer process have also been simulated for the IBM Falcon mask layout. Parametric studies illustrate the effect of system parameters on the final in-plane distortion results.

Citation Download Citation

Eric P. Cotte, Roxann L. Engelstad, Edward G. Lovell, and Cameron J. Brooks "Predicting mechanical distortions in x-ray masks", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351116

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available