EUV lithography research program at ASET

Shinji Okazaki

doi:10.1117/12.351095

25 June 1999 EUV lithography research program at ASET

Shinji Okazaki

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351095
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

EUV lithography is the most promising candidate for delineating patterns below 70 nm. Last year, the Japanese government provided a supplemental budget to the research program on EUV lithography. The overall Japanese plan for the development of EUV lithography has 3 phases. The first is the ASET program, which concerns the development of basic technologies for EUV lithography. The second phase is the development of an EUV lithography system. And the final one is the development of technologies that will make EUV lithography practical. Current plans call for each phase to take 3 years, for a total of 9 years for the whole program. Ten semiconductor manufacturers and two equipment suppliers participate in the first-phase ASET EUV program described in this paper. In this program, the basic technologies of EUV lithography will be developed, which include multilayer mirror mask technology, resist materials and process technology for top surface imagin, and metrology for aspherical optics. This program will be carried out at the Atsugi research center and two branch laboratories at Himeji and Sagamihara.

Citation Download Citation

Shinji Okazaki "EUV lithography research program at ASET", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351095

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available