Time- and space-resolved imaging and numerical simulation of laser zone texturing of Ni-P disk substrates

Shaochen Chen; Mengqi Ye; Constantine P. Grigoropoulos

doi:10.1117/12.352684

15 July 1999 Time- and space-resolved imaging and numerical simulation of laser zone texturing of Ni-P disk substrates

Shaochen Chen, Mengqi Ye, Constantine P. Grigoropoulos

Proceedings Volume 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV; (1999) https://doi.org/10.1117/12.352684
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

This work investigates the transient process of melting and microscale surface deformation upon pulsed Nd:YLF laser heating of Ni-P hard disk substrates. The laser pulse energy is in the range of 1.0 (mu) J to 5.0 (mu) J. The features produced by laser heating have a diameter of approximately 15 micrometers and height in the tens of nanometers range. A laser flash photography system is developed to visualize the transient topography development during the laser texturing process. The system has a nanosecond time resolution and sub-micron spatial resolution. A numerical analysis based on finite difference method is conducted to simulate the microscale energy transport and fluid glow. Comparison between the numerical and the experimental result helps to understand the physical mechanism of the process.

Citation Download Citation

Shaochen Chen, Mengqi Ye, and Constantine P. Grigoropoulos "Time- and space-resolved imaging and numerical simulation of laser zone texturing of Ni-P disk substrates", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352684

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