Paper
7 May 1999 Diagnostics and modeling of a pulsed microwave-excited discharge in oxygen
Margarita G. Baeva, X. Luo, Juergen Uhlenbusch
Author Affiliations +
Proceedings Volume 3571, Tenth International School on Quantum Electronics: Laser Physics and Applications; (1999) https://doi.org/10.1117/12.347624
Event: 10th International School on Quantum Electronics: Lasers: Physics and Applications, 1998, Varna, Bulgaria
Abstract
Investigations on a pulsed O2 plasma under low pressure (1 - 10) mbar have been carried out. Microwave pulses (2.45 GHz) with a duration of (50 - 200) microsecond(s) and a repetition rate of (10 - 500) Hz are typical for the experiments. The electron density has been determined by means of an HCN laser interferometer. Detection of negative ions O- has been performed using a photodetachment technique with a Nd:YAG laser. A kinetic model predicting the temporal behavior of the densities of oxygen atoms and molecules, metastable singlets O2(a1(Delta) , b1(Sigma) ), negative ions O-, positive ions O+2, ozone, and the electron density has been developed. The experimental and theoretical data are fond to agree well.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Margarita G. Baeva, X. Luo, and Juergen Uhlenbusch "Diagnostics and modeling of a pulsed microwave-excited discharge in oxygen", Proc. SPIE 3571, Tenth International School on Quantum Electronics: Laser Physics and Applications, (7 May 1999); https://doi.org/10.1117/12.347624
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KEYWORDS
Microwave radiation

Plasma

Ions

Oxygen

Diagnostics

Interferometers

Molecules

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