Zone plate interferometer for testing aspherical surfaces

Qiming Xin; Fengxian Quan

doi:10.1117/12.318326

5 August 1998 Zone plate interferometer for testing aspherical surfaces

Qiming Xin, Fengxian Quan

Proceedings Volume 3557, Current Developments in Optical Elements and Manufacturing; (1998) https://doi.org/10.1117/12.318326
Event: Photonics China '98, 1998, Beijing, China

Abstract

The recent development and application of the technique of using zone plate interferometry to test aspherical surfaces are summarized. The advantages and disadvantages of several types of zone-plate interferometer are given. The principle and method for testing aspherical surfaces using a modified zone-plane (MZP) are described. The relation between installation of MZP and measurement precision is analyzed. The design of MZP is modified to eliminate the curvature at the border of the interference pattern. At last, some experimental results are given.

Citation Download Citation

Qiming Xin and Fengxian Quan "Zone plate interferometer for testing aspherical surfaces", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318326

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available