Evaluation of optical supersmooth surface using AFM and comparison to interference method

Jianbai Li; Dachen Li; Xiaoli Zhang; Xiaoyun Li; Anging Zhuo

doi:10.1117/12.318330

5 August 1998 Evaluation of optical supersmooth surface using AFM and comparison to interference method

Jianbai Li, Dachen Li, Xiaoli Zhang, Xiaoyun Li, Anging Zhuo

Proceedings Volume 3557, Current Developments in Optical Elements and Manufacturing; (1998) https://doi.org/10.1117/12.318330
Event: Photonics China '98, 1998, Beijing, China

Abstract

In this paper, authors had presented an Atomic Force Microscope (AFM) method, which can test more parameters of supersmooth surface, e.g. P-V value, arithmetic mean Ra, root mean square R_q and micro-defect on surface micro- profile. The research results presented in the paper presented that the method has importance application for studying optical supersmooth surface in components of soft x-ray optics, high intensity optics and high power solid- state laser. The method can arrive at nanometer and subnanometer grade resolution in evaluating the supersmooth surface microprofile. The comparison between AFM and classical interferometer method is given in the paper.

Citation Download Citation

Jianbai Li, Dachen Li, Xiaoli Zhang, Xiaoyun Li, and Anging Zhuo "Evaluation of optical supersmooth surface using AFM and comparison to interference method", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318330

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