Measuring fluence distribution of excimer laser with YBCO film light thermodetector

Xiaoming Wen; Xueling Yang; Pengxiang Zhang; Yan Zhang; Guozheng Li

doi:10.1117/12.344119

7 August 1998 Measuring fluence distribution of excimer laser with YBCO film light thermodetector

Xiaoming Wen, Xueling Yang, Pengxiang Zhang, Yan Zhang, Guozheng Li

Proceedings Volume 3549, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers II; (1998) https://doi.org/10.1117/12.344119
Event: Photonics China '98, 1998, Beijing, China

Abstract

The average fluence distribution of excimer laser is an important parameter in various applications of excimer laser. But it is more difficulty to measure the parameter due to UV wavelength of excimer laser, very short pulse width, energy undulation among various pulses and or so. Basing on the anisotropy Seeback tensor coefficients, a light-thermo radiation detector made from high Tc superconductor YBa₂Cu₃O_7-(delta ) was fabricated. The novel advantages of this detector are that it functions at room temperature, with very low noise, very fast response and higher sensitivity within a very wide wavelength from ultraviolet to infrared. A measuring system of average fluence distribution of excimer laser is formed with the YBCO light-thermo-detector, a lock-in amplifier and a computer. The principle of the measurement system is analyzed, XeCl laser fluence distribution is measured.

Citation Download Citation

Xiaoming Wen, Xueling Yang, Pengxiang Zhang, Yan Zhang, and Guozheng Li "Measuring fluence distribution of excimer laser with YBCO film light thermodetector", Proc. SPIE 3549, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers II, (7 August 1998); https://doi.org/10.1117/12.344119

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available