Implementation of a standardized 0.35-um WLR test vehicle

Ehren Achee; Greg Petter; James Reedholm

doi:10.1117/12.324371

28 August 1998 Implementation of a standardized 0.35-μm WLR test vehicle

Ehren Achee, Greg Petter, James Reedholm

Proceedings Volume 3510, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV; (1998) https://doi.org/10.1117/12.324371
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

Abstract

The first global demonstration of wafer-level reliability (WLR) test structure and methodology effectiveness is in progress. This action, initiated by an organization of fabless companies and concentrated on foundry service providers, represents a market-driven effort. WLR has been discussed, evaluated, promoted and even made a requirement in semiconductor IC procurement documents. This project utilizes a common suite of WLR structures fabricated at most commercial foundries to demonstrate the effectiveness of WLR structures for use as process monitors.

Citation Download Citation

Ehren Achee, Greg Petter, and James Reedholm "Implementation of a standardized 0.35-μm WLR test vehicle", Proc. SPIE 3510, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV, (28 August 1998); https://doi.org/10.1117/12.324371

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