New ellipsometric configuration based on a Zeeman laser for fast measurements

Liviu Singher; Leonid Boim; Gregory R. Toker

doi:10.1117/12.312971

30 June 1998 New ellipsometric configuration based on a Zeeman laser for fast measurements

Liviu Singher, Leonid Boim, Gregory R. Toker

Proceedings Volume 3478, Laser Interferometry IX: Techniques and Analysis; (1998) https://doi.org/10.1117/12.312971
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A new ellipsometric configuration suitable for in-situ studying of fast processes is proposed. This configuration eliminates the use of mechanically the use of mechanically rotating components. The light beam from a Zeeman laser is directed to a sample. The reflected light passes through two subsequent Brewster prisms and a polarizer. The plane of incidence of the first Brewster prism is perpendicular to the sample and to the incidence plane of the second Brewster prism. The intensities of the beams reflected from the prisms are proportional to the amplitudes of s- and p-total reflection coefficients of the sample, and the intensity of the beam transmitted through both the prisms and the polarizer contains information on their phase difference. The light from a Zeeman laser emerges as linearly polarized light whose plane of polarization rotates with the frequency of 1.2 MHz, therefore the signal on the detectors contains DC and AC components. The ellipsometric angle (Psi) is obtained from the ratio of the amplitudes of the AC signals from two detectors, whereas the ellipsometric angle (Delta) is obtained from a third detector. This ellipsometric system is fully automatic and free of any moving parts. The ellipsometer has a time resolution of approximately 1 microsecond(s) ec, and is not sensitive to low frequency noise. Theoretical calculations based on Jones matrix approach are presented as well as experimental results for a SiO2 layer on Si.

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Liviu Singher, Leonid Boim, and Gregory R. Toker "New ellipsometric configuration based on a Zeeman laser for fast measurements", Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); https://doi.org/10.1117/12.312971

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KEYWORDS

Prisms

Sensors

Signal detection

Polarization

Polarizers

Silicon

Nondestructive evaluation

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