Measurement of a correction for the phase change on reflection due to surface roughness

Richard K. Leach

doi:10.1117/12.323103

30 September 1998 Measurement of a correction for the phase change on reflection due to surface roughness

Richard K. Leach

Proceedings Volume 3477, Recent Developments in Optical Gauge Block Metrology; (1998) https://doi.org/10.1117/12.323103
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A system has been developed at the National Physics Laboratory that measures a correction for the phase change on reflection due to surface roughness when measuring the length of a gauge block by optical interferometry. The system uses an integrating sphere and photodetectors to measure the intensity of the light that is both diffusely and specularly reflected at a surface. From these intensities the system calculates a surface roughness parameter that is proportional to the phase change on reflection due to surface roughness. The operating principle of the system along with the uncertainties and bandwidth limitations of an integrating sphere are discussed. An interferometric system has also been developed to calibrate the integrating sphere method, but it was found that effects due to wringing caused such high uncertainties that it was necessary to use the well-established phase stack method instead. The new method is quick and easy to use and measures a roughness correction for every gauge in a set.

Citation Download Citation

Richard K. Leach "Measurement of a correction for the phase change on reflection due to surface roughness", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); https://doi.org/10.1117/12.323103

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