Development of a new automatic gauge block interferometer up to 250 mm

Tatsuya Narumi; Shunji Shutoh; Taizo Nakamura; Junichi Iida; Masaji Sawabe

doi:10.1117/12.323094

30 September 1998 Development of a new automatic gauge block interferometer up to 250 mm

Tatsuya Narumi, Shunji Shutoh, Taizo Nakamura, Junichi Iida, Masaji Sawabe

Proceedings Volume 3477, Recent Developments in Optical Gauge Block Metrology; (1998) https://doi.org/10.1117/12.323094
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

An interferometer has been developed by Mitutoyo Corporation which automatically measures with the optical sensor the fraction of interference fringe. The optical fiber sensor is fixed around the center position of gauge block and central both sides of platen, and the fraction is measured the interference fringe by scanning of optical wedge, which is put between half-reflection-mirror and gauge block. The light source uses both 633 nm and 543 nm He-Ne lasers stabilized within 1 X 10^-9. The gauge block length can be determined by means of coincidence method. A set of 12 gauge blocks placed on the table and can be measured one by one in turn. For the refractive index of surrounding air, temperature, atmospheric pressure and humidity are measured by sensor in the interferometer. A personal bias by interference fringe reading is eliminated and measurement is carried out with easy operation and high precision. Repeatability of reading of interference fringe fraction.

Citation Download Citation

Tatsuya Narumi, Shunji Shutoh, Taizo Nakamura, Junichi Iida, and Masaji Sawabe "Development of a new automatic gauge block interferometer up to 250 mm", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); https://doi.org/10.1117/12.323094

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