Use of Kirkpatrick-Baez multilayer optics for x-ray fluorescence imaging

Alex Bakulin; Stephen M. Durbin; Chian Liu; Jenny Erdmann; Albert T. Macrander; Terrence Jach

doi:10.1117/12.332509

11 December 1998 Use of Kirkpatrick-Baez multilayer optics for x-ray fluorescence imaging

Alex Bakulin, Stephen M. Durbin, Chian Liu, Jenny Erdmann, Albert T. Macrander, Terrence Jach

Proceedings Volume 3448, Crystal and Multilayer Optics; (1998) https://doi.org/10.1117/12.332509
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

We discuss the possibilities for using Kirkpatrick-Baez (K-B) multilayer elements to directly image the fluorescence distribution from a specimen under x-ray illumination. X-ray fluorescence would be collected by K-B elements close to the specimen, with a magnified image formed at an area detector about 0.5 m away from the source. This is in contrast to the use of K-B optics to form a microprobe beam that is rastered across a surface while the x-ray fluorescence is recorded to form a fluorescent image. Tungsten-carbon multilayers on curved substrates have been fabricated at the Advanced Photon Source, and their focusing properties have been characterized by a laboratory x-ray source. Synchrotron applications would illuminate specimens with lithographic patterns, for example, with the image being formed at an x-ray CCD camera. The ability to form an x-ray fluorescent image, and therefore a map of the specimen's elemental distribution near the surface, could provide a useful analytical tool without the usual need for a microfocusing beam. Furthermore, there are interesting possibilities offered by combining fluorescence imaging with x-ray near edge absorption spectroscopy (XANES), extended x- ray absorption spectroscopy (EXAFS), and x-ray standing waves.

Citation Download Citation

Alex Bakulin, Stephen M. Durbin, Chian Liu, Jenny Erdmann, Albert T. Macrander, and Terrence Jach "Use of Kirkpatrick-Baez multilayer optics for x-ray fluorescence imaging", Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998); https://doi.org/10.1117/12.332509

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