Understanding surface scatter effects in grazing incidence x-ray synchrotron applications

James E. Harvey; Patrick L. Thompson; Cynthia L. Vernold

doi:10.1117/12.331121

13 November 1998 Understanding surface scatter effects in grazing incidence x-ray synchrotron applications

James E. Harvey, Patrick L. Thompson, Cynthia L. Vernold

Proceedings Volume 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications; (1998) https://doi.org/10.1117/12.331121
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Non-intuitive surface scatter effects resulting from practical optical fabrication tolerances frequently dominate both diffraction effects and geometrical aberrations in high resolution grazing incidence x-ray synchrotron applications. The resulting reduction optical performance due to scattering is a strong function of x-ray energy, residual surface characteristics, incident angle, and the optical performance criterion appropriate to the application. A simple Fourier treatment of surface scatter phenomena, based upon a non-paraxial scalar diffraction theory, is referenced and utilized to produce parametric performance predictions that provide physical insight and understanding into the surface scatter phenomenon and its effect upon optical performance in x-ray synchrotron applications.

Citation Download Citation

James E. Harvey, Patrick L. Thompson, and Cynthia L. Vernold "Understanding surface scatter effects in grazing incidence x-ray synchrotron applications", Proc. SPIE 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications, (13 November 1998); https://doi.org/10.1117/12.331121

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