Fabrication of an aspherical mirror for soft x-ray optics system

Petros Abraha Abbay; Toyoshiro Inamura; Tamio T. Hara; Toshio Sata

doi:10.1117/12.328525

29 October 1998 Fabrication of an aspherical mirror for soft x-ray optics system

Petros Abraha Abbay, Toyoshiro Inamura, Tamio T. Hara, Toshio Sata

Proceedings Volume 3429, Current Developments in Optical Design and Engineering VII; (1998) https://doi.org/10.1117/12.328525
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

The development of soft x-ray optics demands an extremely smooth aspherical mirrors with a geometrical accuracy in the sub nanometer range. So far several fabrication methods that utilize high precision machining operations, ion beam milling and plasma assisted chemical etching have been under study with each method having its own advantages and disadvantages. This study introduces a new fabrication method that makes use of an oil pressure to elastically deflect a finished spherical surface. The validity of the proposed method is assessed an the effective parameters are defined.

Citation Download Citation

Petros Abraha Abbay, Toyoshiro Inamura, Tamio T. Hara, and Toshio Sata "Fabrication of an aspherical mirror for soft x-ray optics system", Proc. SPIE 3429, Current Developments in Optical Design and Engineering VII, (29 October 1998); https://doi.org/10.1117/12.328525

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