Foundry mask shop in Taiwan

Chue-San Yoo; Jia-Jing Wang

doi:10.1117/12.328856

1 September 1998 Foundry mask shop in Taiwan

Chue-San Yoo, Jia-Jing Wang

Proceedings Volume 3412, Photomask and X-Ray Mask Technology V; (1998) https://doi.org/10.1117/12.328856
Event: Photomask Japan '98 Symposium on Photomask and X-Ray Mask Technology V, 1998, Kawasaki City, Japan

Abstract

Foundry maskshop is deemed to be one of the major contributors to the success of a wafer foundry fab. Our maskshop has two unique features. First, we have highly automated information cross-flow between the wafer fab and maskshop. Second, we develop mask technology together with photolithography technology in wafer fabs.

Citation Download Citation

Chue-San Yoo and Jia-Jing Wang "Foundry mask shop in Taiwan", Proc. SPIE 3412, Photomask and X-Ray Mask Technology V, (1 September 1998); https://doi.org/10.1117/12.328856

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