Determination of precise optical surface roughness parameters using ARS data

Valentina V. Azarova; U. N. Lokhov; K. Malitsky

doi:10.1117/12.323357

29 September 1998 Determination of precise optical surface roughness parameters using ARS data

Valentina V. Azarova, U. N. Lokhov, K. Malitsky

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323357
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

The comparison of different methods of measuring surface roughness parameters, i.e. angle-resolved scattering (ARS) technique and atomic force microscope (AFM) profilometry, was performed for quartz precise optical surface, obtained by different polishing processes. The functions of power spectral density, calculated from ARS, using vector scattering theory, and from AFM data are in good agreement in the range of polar scatter angles 30..75 degrees. In this range the angular scattering is well predicted using the exponential autocorrelation function, with parameters, calculated from surface profile. The autocorrelation length, calculated from ARS data is above range using exponential statistics, remains practically constant for different surfaces, obtained by the same polishing process. The latter allows to consider it as the characteristic parameter of certain polishing process.

Citation Download Citation

Valentina V. Azarova, U. N. Lokhov, and K. Malitsky "Determination of precise optical surface roughness parameters using ARS data", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323357

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