Aberrations of an optical system in the field heterodyne interferometer

Tomasz S. Tkaczyk; Romulad Jozwicki

doi:10.1117/12.323369

29 September 1998 Aberrations of an optical system in the field heterodyne interferometer

Tomasz S. Tkaczyk, Romulad Jozwicki

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323369
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Heterodyne interferometry method for shape measurement based on the fringe projection is presented. Fringe pattern is displacing in the measurement field due to the interference of beams with slightly shifted frequencies. The phase difference of signals detected by matrix of detectors gives the information about the shape of surface under investigation. Phase measurement errors generated by imaging optical system are given.

Citation Download Citation

Tomasz S. Tkaczyk and Romulad Jozwicki "Aberrations of an optical system in the field heterodyne interferometer", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323369

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