High-performance micromachined thermopile linear arrays

Marc C. Foote; Eric W. Jones

doi:10.1117/12.317587

22 July 1998 High-performance micromachined thermopile linear arrays

Marc C. Foote, Eric W. Jones

Proceedings Volume 3379, Infrared Detectors and Focal Plane Arrays V; (1998) https://doi.org/10.1117/12.317587
Event: Aerospace/Defense Sensing and Controls, 1998, Orlando, FL, United States

Abstract

Linear thermopile infrared detector arrays have been produced with D* values as high as 2.2 X 10⁹ cmHz^1/2W for 83 ms response times. Typical responsivity is 1000 V/W. This result has been achieved with Bi-Te and Bi-Sb-Te thermoelectric materials on micromachined silicon nitride membranes. Results for several device geometries are described and compared to literature values for Schwartz type thermocouple detectors and for thin film thermopile detectors and arrays. Measurements of responsivity as a function of modulation frequency and wavelength are presented.

Citation Download Citation

Marc C. Foote and Eric W. Jones "High-performance micromachined thermopile linear arrays", Proc. SPIE 3379, Infrared Detectors and Focal Plane Arrays V, (22 July 1998); https://doi.org/10.1117/12.317587

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available