Methods and devices for check-up of content of contamination in liquid media with low absorbability

Olexander I. Bilyi; Vasyl B. Getman; Yaroslav P. Ferensovich; T. V. Tetyuk; A. K. Chkolnyi

doi:10.1117/12.306267

20 April 1998 Methods and devices for check-up of content of contamination in liquid media with low absorbability

Olexander I. Bilyi, Vasyl B. Getman, Yaroslav P. Ferensovich, T. V. Tetyuk, A. K. Chkolnyi

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306267
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

The demands of purity of liquid media with low absorbability such as photoresist used in microelectronics production of light oil-products are enhanced at present. Particular attention is given to developing of methods and devices for estimation of liquid purity. In this report the methods and the analyzers, developed at Applied Physics Institute of Ivan Franko State University, intended for checking the content of the microparticles larger than 0.3 micrometers in liquid photoresist or light oil-products are considered.

Citation Download Citation

Olexander I. Bilyi, Vasyl B. Getman, Yaroslav P. Ferensovich, T. V. Tetyuk, and A. K. Chkolnyi "Methods and devices for check-up of content of contamination in liquid media with low absorbability", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306267

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