Paper
20 April 1998 Ellipsometric probing of metallic mirrors with modified surfaces
Leonid V. Poperenko, Vladimir S. Voitsenya, M. V. Vinnichenko
Author Affiliations +
Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306202
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine
Abstract
Optical characterization of the Cu2+, Al2+ and Cr2+ ions implanted copper, aluminum and stainless steel mirrors respectively as well as the stainless steel mirrors with boron coatings was carried out by multiple angle of incidence ellipsometry. Both implanted and nonimplanted areas for aluminum, copper and stainless steel mirrors was then sputtered and probed. Changes of the optical properties of the stainless steel samples after bombardment by Cr2+ would occur due to the formation of a carbon layer on a mirror surface after the implantation, without modification of a microstructure of the surface. In case of the copper mirrors, irradiated by Cu2+ ions and aluminum mirrors implanted by Al2+ ions, the changes of optical parameters would be associated with modification of the subsurfaces layers' microstructure. The optical parameters and thicknesses of boron films on the stainless steel substrate were determined and were 7.3 nm and 16.8 nm respectively.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Leonid V. Poperenko, Vladimir S. Voitsenya, and M. V. Vinnichenko "Ellipsometric probing of metallic mirrors with modified surfaces", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306202
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KEYWORDS
Mirrors

Copper

Ions

Aluminum

Boron

Reflection

Optical coatings

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