Controlling of the state of CoSi2 thin film by laser radiation

Maris Knite; Arthur Medvids

doi:10.1117/12.306262

20 April 1998 Controlling of the state of CoSi₂ thin film by laser radiation

Maris Knite, Arthur Medvids

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306262
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

Formation of thin crystalline layers of CoSi₂ deposited by coevaporation of Co + Si mixtures on SiO₂/Si substrates has been attained by a Q-switched YAG:Nd and CO₂ lasers. Electrical and optical properties of the CoSi₂ layers have been studied by simultaneous laser irradiation. It is shown that high quality resistive crystalline CoSi₂ films can be obtained by treatment with CO₂ laser radiation of 2 MW/cm² to 8 MW/cm² intensity. Besides, resistance of the layer decreases by a factor of 9. When such a layer is subjected to Q-switched YAG:Nd laser radiation 20 MW/cm² - 35 MW/cm² intensity, the magnitude of the resistance increases by a factor of 3 due to forming clusters of vacancies in CoSi₂. The CoSi₂ phase and rise of concentration of vacancies was determined by x-ray diffraction. It is shown that the change in optical parameters of the resistive film subject to laser treatment can be used for both remote sensing of resistivity and quality check.

Citation Download Citation

Maris Knite and Arthur Medvids "Controlling of the state of CoSi₂ thin film by laser radiation", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306262

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available