1-kW industrial excimer laser (308-nm)

John C.M. Timmermans

doi:10.1117/12.321592

14 September 1998 1-kW industrial excimer laser (308-nm)

John C.M. Timmermans

Proceedings Volume 3343, High-Power Laser Ablation; (1998) https://doi.org/10.1117/12.321592
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States

Abstract

The short wavelength of excimer lasers offers advantages for industrial applications such as cutting, drilling surface treatment and annealing. At NCLR a 1 kW (1 J, 1 kHz) XeCl- laser is under development. This laser has several advantages above commercial excimer lasers that enables it to go to the high average power of 1 kW combined with an excellent beam quality.

Citation Download Citation

John C.M. Timmermans "1-kW industrial excimer laser (308-nm)", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); https://doi.org/10.1117/12.321592

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