Dissolution of phenolic polymers in aqueous base: the influence of polymer structure

Christopher L. McAdams; Lewis W. Flanagin; Clifford L. Henderson; Adam R. Pawlowski; Pavlos C. Tsiartas; C. Grant Willson

doi:10.1117/12.312345

29 June 1998 Dissolution of phenolic polymers in aqueous base: the influence of polymer structure

Christopher L. McAdams, Lewis W. Flanagin, Clifford L. Henderson, Adam R. Pawlowski, Pavlos C. Tsiartas, C. Grant Willson

Author Affiliations +

Proceedings Volume 3333, Advances in Resist Technology and Processing XV; (1998) https://doi.org/10.1117/12.312345
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

The differences in the dissolution behavior of novolac and poly(4-hydroxystyrene) (PHS) can be explained in terms of differences in the pK_a of the two polymers. The proximity of the hydroxyl groups in ortho-ortho bonded novolac causes a large change in the pK_a of the polymer as a function of the degree of ionization. The increased distance between phenolic sites in PHS attenuates this effect. Novolac and PHS samples have been titrated from basic to acidic conditions to determine the `apparent pK_a' of each polymer as a function of degree of ionization, (alpha) . The turbidimetric endpoints show that novolac precipitates earlier in the titration than PHS. This differences provides an explanation for the `ortho-ortho effect' and the different inhibition efficiencies of these polymers.

Citation Download Citation

Christopher L. McAdams, Lewis W. Flanagin, Clifford L. Henderson, Adam R. Pawlowski, Pavlos C. Tsiartas, and C. Grant Willson "Dissolution of phenolic polymers in aqueous base: the influence of polymer structure", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); https://doi.org/10.1117/12.312345

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