Computational and experimental study of spin coater air flow

Xiaoguang Zhu; Faqiu Liang; A. Haji-Sheikh; N. Ghariban

doi:10.1117/12.312396

29 June 1998 Computational and experimental study of spin coater air flow

Xiaoguang Zhu, Faqiu Liang, A. Haji-Sheikh, N. Ghariban

Proceedings Volume 3333, Advances in Resist Technology and Processing XV; (1998) https://doi.org/10.1117/12.312396
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

An extensive 2- and 3-D analysis of air flow in a POLARIS^TM 2200 Microlithography Cluster spin coater was conducted using FLUENT^TM Computational Fluid Dynamics (CFD) software. To supplement this analysis, direct measurement of air flow velocity was also performed using a Dantec^TM Hot Wire Anemometer. Velocity measurements were made along two major planes across the entire flow field in the spin coater at various operating conditions. It was found that the flow velocity at the spin coater inlet is much lower than previously assumed and quite nonuniform. Based on this observation, a pressure boundary condition rather than a velocity boundary condition was used for subsequent CFD analysis. A comparison between calculated results and experimental data shows that the 3D model accurately predicts the air flow field in the spin coater. An added advantage of this approach is that the CFD model can be easily generated from the mechanical design database and used to analyze the effect of design changes. The modeled and measured results show that the flow pattern in the spin bowl is affected by interactions between the spinning wafer, exhaust flow, and the gap between the spin head and surrounding baffle. Different operating conditions such as spin speed, inlet pressure, and exhaust pressure were found to generate substantially different flow patterns. It was also found that backflow of air could be generated under certain conditions.

Citation Download Citation

Xiaoguang Zhu, Faqiu Liang, A. Haji-Sheikh, and N. Ghariban "Computational and experimental study of spin coater air flow", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); https://doi.org/10.1117/12.312396

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available