Scanning force microscope using point diffraction interferometer

Xu-Dong Mou; Yifeng You; Yongmo Zhuo; Yongying Yang; Ming Xu

doi:10.1117/12.308755

8 June 1998 Scanning force microscope using point diffraction interferometer

Xu-Dong Mou, Yifeng You, Yongmo Zhuo, Yongying Yang, Ming Xu

Proceedings Volume 3332, Metrology, Inspection, and Process Control for Microlithography XII; (1998) https://doi.org/10.1117/12.308755
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

A new optical interferometer suitable for the scanning force microscope is presented in this paper. The cantilever itself is used as a micro interferometer element. The deflection of the cantilever is detected by the interference between the geometrical reflected wave and the backward diffracted wave. This interferometer has a very simple structure, fewer optical components, lower cost, and complete common light path. 0.01 nm vertical resolution is gotten by this instrument.

Citation Download Citation

Xu-Dong Mou, Yifeng You, Yongmo Zhuo, Yongying Yang, and Ming Xu "Scanning force microscope using point diffraction interferometer", Proc. SPIE 3332, Metrology, Inspection, and Process Control for Microlithography XII, (8 June 1998); https://doi.org/10.1117/12.308755

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