Application Of Methyl A-Chloroacrylate Copolymers As Electron Sensitive Positive Resists

Juey H. Lai

doi:10.1117/12.933405

30 June 1982 Application Of Methyl α-Chloroacrylate Copolymers As Electron Sensitive Positive Resists

Juey H. Lai

Proceedings Volume 0333, Submicron Lithography I; (1982) https://doi.org/10.1117/12.933405
Event: 1982 Microlithography Conferences, 1982, Santa Clara, United States

Abstract

Poly(methly a-chloracrylate) (PMCA) is one of the vinyl polymers which is highly sensitive to high energy radiation. The G, value (defined as number of chain scission events per 100 ev of energy absorbed) of PMCA is 6.0 which is significantly higher than 1.6 of PMMA - the current standard e-beam resist. Used as a positive electron resist, the sensitivity of PMCA is considerably better than PMMA but less than one would expect from its high Gs' Such behavior can be attributed to: (a) the occurrence of non-negligible concurrent crosslinking in PMCA and (b) the poor solubility of PMCA. In the past, we have reported the synthesis, characterization and e-beam exposure results for the copolymers of MCA and several methacrylates, including methyl methacrylate (MMA), cyclohexyl methacrylate and n-hexyl methacrylate. In the present paper, the results of our recent studies for the copolymers of MCA and n-butyl methacrylate (BMA), of MCA and methacrylic acid (MAA) and the new results for the copolymers of MCA and MMA are presented. The optimization of copolymer composition and molecular weight, and the selection of developers based on solubility parameter concept are discussed in the paper. It has been found that both MCA/BMA and MCA/MMA copolymer resists possess submicron resolution and are significantly more sensitive than PMMA.

Citation Download Citation

Juey H. Lai "Application Of Methyl α-Chloroacrylate Copolymers As Electron Sensitive Positive Resists", Proc. SPIE 0333, Submicron Lithography I, (30 June 1982); https://doi.org/10.1117/12.933405

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available