Thermochemical technology of the layer-by-layer synthesis of multilevel chromium masks as precision molds for the phase shaping of high-efficiency large-aperture lenses

Valery P. Kiryanov; Alexander G. Verkhogliad; Leonid B. Kastorsky; Alexey V. Kiryanov; Vladimir I. Kozlov

doi:10.1117/12.310590

18 June 1998 Thermochemical technology of the layer-by-layer synthesis of multilevel chromium masks as precision molds for the phase shaping of high-efficiency large-aperture lenses

Valery P. Kiryanov, Alexander G. Verkhogliad, Leonid B. Kastorsky, Alexey V. Kiryanov, Vladimir I. Kozlov

Author Affiliations +

Proceedings Volume 3291, Diffractive and Holographic Device Technologies and Applications V; (1998) https://doi.org/10.1117/12.310590
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

The new technology of the high-efficient large-aperture multilevel diffractive optical elements manufacture is examined. This technology is based on the properties of the laser thermochemical writing of hidden images in chromium films and possibilities of the circular laser photoplotter CLWS-300. The ultra-high resolution interferometric method is used for the hidden image precision alignment.

Citation Download Citation

Valery P. Kiryanov, Alexander G. Verkhogliad, Leonid B. Kastorsky, Alexey V. Kiryanov, and Vladimir I. Kozlov "Thermochemical technology of the layer-by-layer synthesis of multilevel chromium masks as precision molds for the phase shaping of high-efficiency large-aperture lenses", Proc. SPIE 3291, Diffractive and Holographic Device Technologies and Applications V, (18 June 1998); https://doi.org/10.1117/12.310590

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Chromium

Etching

Photoresist materials

Diffractive optical elements

Reticles

Computer generated holography

Laser applications

Show All Keywords

Keywords/Phrases

Search In:

Publication Years