Monolithic wavelength-graded VCSEL and wavelength-selective photodetector arrays for WDM applications

Julian Cheng; Sanh Q. Luong; Gerry G. Ortiz; Yuxin Zhou; Jun Lu; Hong Q. Hou; B. Eugene Hammons; G. Allen Vawter

doi:10.1117/12.298233

22 December 1997 Monolithic wavelength-graded VCSEL and wavelength-selective photodetector arrays for WDM applications

Julian Cheng, Sanh Q. Luong, Gerry G. Ortiz, Yuxin Zhou, Jun Lu, Hong Q. Hou, B. Eugene Hammons, G. Allen Vawter

Proceedings Volume 3290, Optoelectronic Integrated Circuits II; (1997) https://doi.org/10.1117/12.298233
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

Monolithic, multiple-wavelength VCSEL arrays have been obtained by using the surface-controlled enhancement and reduction of the MOCVD epitaxial growth rate to produce a periodic and repeatable grading of the resonance wavelength over a span of greater than 30 nm. Room temperature, electrically-injected, cw lasing has also been achieved with a wavelength span of greater than 20 nm. We show here both the enhancement and the reduction of the growth rate of the entire VCSEL structure and demonstrate the controlled variation of the VCSEL lasing wavelength over a widened spectral range by exploiting both of these effects. Using the same growth techniques, wavelength-selective, resonance-enhanced photodetector arrays with closely-matched resonance wavelengths can be monolithically integrated on the same epilayer structure. We demonstrate the repeatability of this technique using different arrays from the same growth run.

Citation Download Citation

Julian Cheng, Sanh Q. Luong, Gerry G. Ortiz, Yuxin Zhou, Jun Lu, Hong Q. Hou, B. Eugene Hammons, and G. Allen Vawter "Monolithic wavelength-graded VCSEL and wavelength-selective photodetector arrays for WDM applications", Proc. SPIE 3290, Optoelectronic Integrated Circuits II, (22 December 1997); https://doi.org/10.1117/12.298233

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