Monolithic fabrication of nanofluidic artificial gel media for DNA electrophoresis

Stephen W. Turner; Harold G. Craighead

doi:10.1117/12.304369

26 March 1998 Monolithic fabrication of nanofluidic artificial gel media for DNA electrophoresis

Stephen W. Turner, Harold G. Craighead

Proceedings Volume 3258, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications; (1998) https://doi.org/10.1117/12.304369
Event: BiOS '98 International Biomedical Optics Symposium, 1998, San Jose, CA, United States

Abstract

A new technique for fabricating 2D artificial gels for DNA electrophoresis is presented. The technique differs from previous approaches in that the entire device is fabricated as a monolithic unit using exclusively planar processing techniques borrowed from semiconductor electronics fabrication. The height of the fluid gap between the dielectric floor and ceiling is determined by the thickness of a sacrificial layer which is removed by a wet chemical etch. This allows precise control and excellent uniformity of the gap over an entire silicon wafer. Gap control better than 5 nm has been demonstrated for floor-to-ceiling height for the fluid gap. The lateral resolution which can be attained is limited only by available lithographic techniques. In this work, 1 micrometers diameter pillars are defined with i-line photolithography. Fluid interconnects are established with a liquid meniscus to the hedge of the device.

Citation Download Citation

Stephen W. Turner and Harold G. Craighead "Monolithic fabrication of nanofluidic artificial gel media for DNA electrophoresis", Proc. SPIE 3258, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications, (26 March 1998); https://doi.org/10.1117/12.304369

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