New Techniques For Roll Coating Of Optical Thin Film

Martin I. Ridge; Ronald P. Howson; Charles A. Bishop

doi:10.1117/12.933285

29 April 1982 New Techniques For Roll Coating Of Optical Thin Film

Martin I. Ridge, Ronald P. Howson, Charles A. Bishop

Proceedings Volume 0325, Optical Thin Films; (1982) https://doi.org/10.1117/12.933285
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

Methods of deposition have been developed which are adapted for the vacuum roll-to-roll coating of plastic with optical thin films. Planar magnetron sputtering and low pressure plasma assisted CVD are shown to be peculiarly fitted for this application. The construction of such an apparatus is described and examples of indium and indium-tin oxide films made by these techniques are given.

Citation Download Citation

Martin I. Ridge, Ronald P. Howson, and Charles A. Bishop "New Techniques For Roll Coating Of Optical Thin Film", Proc. SPIE 0325, Optical Thin Films, (29 April 1982); https://doi.org/10.1117/12.933285

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