Frequency-tunable electrostatically driven torsional resonator

Takashi Usuda

doi:10.1117/12.293520

14 November 1997 Frequency-tunable electrostatically driven torsional resonator

Takashi Usuda

Proceedings Volume 3241, Smart Materials, Structures, and Integrated Systems; (1997) https://doi.org/10.1117/12.293520
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

A torsional mode frequency tunable electrostatically driven resonator is presented. The resonator is designed using the simple linear elastic theory and fabricated by a bulk- micromachining technique. A bias voltage generates an electrostatic vertical force, then induces a bending moment in the torsional spring. The bending moment increases the torsional rigidity equivalently. Thus its natural frequency of oscillation is controlled by changing the bias voltage. A preliminary measurement of the resonator shows a natural frequency shift from 135.85 Hz to 136.10 Hz by the application of a bias voltage of 100 V. The theory, construction, fabrication process and demonstration of the resonator are presented.

Citation Download Citation

Takashi Usuda "Frequency-tunable electrostatically driven torsional resonator", Proc. SPIE 3241, Smart Materials, Structures, and Integrated Systems, (14 November 1997); https://doi.org/10.1117/12.293520

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available