Paper
21 November 1997 Integrated thin film fluorescence NOx sensor concept
Meg L. Tuma, Russell W. Gruhlke
Author Affiliations +
Abstract
A fluorescence sensor system is proposed that integrates emission and detection methods as well as optical and electronic components in a thin film geometry. Predicted properties of this sensor include: increased sensitivity, shielding form unwanted radiation, wavelength filtering, potential operation at high temperatures, and miniaturization. The sensor can be tuned to measure a wide variety of species by varying its thin film corrugation periodicity, in particular, the sensor can be used to detect NOx.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Meg L. Tuma and Russell W. Gruhlke "Integrated thin film fluorescence NOx sensor concept", Proc. SPIE 3172, Optical Technology in Fluid, Thermal, and Combustion Flow III, (21 November 1997); https://doi.org/10.1117/12.293421
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
Sensors

Luminescence

Thin films

Surface plasmons

Metals

Dielectrics

Photoresist materials

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