Excimer laser beam shaping and material processing using diffractive optics

Stewart W. Williams; Paul J. Marsden; Nick C. Roberts; Jagjit Sidhu; Mark A. Venables

doi:10.1117/12.270277

4 April 1997 Excimer laser beam shaping and material processing using diffractive optics

Stewart W. Williams, Paul J. Marsden, Nick C. Roberts, Jagjit Sidhu, Mark A. Venables

Proceedings Volume 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (1997) https://doi.org/10.1117/12.270277
Event: XI International Symposium on Gas Flow and Chemical Lasers and High Power Laser Conference, 1996, Edinburgh, United Kingdom

Abstract

Diffractive optical systems have been developed to allow high efficiency material processing using excimer lasers. These systems allow beam homogenizing and shaping for surface treatment and parallel focusing for multiple hole drilling. Beam utilization factors of 80% have been achieved.

Citation Download Citation

Stewart W. Williams, Paul J. Marsden, Nick C. Roberts, Jagjit Sidhu, and Mark A. Venables "Excimer laser beam shaping and material processing using diffractive optics", Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (4 April 1997); https://doi.org/10.1117/12.270277

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