Measurement and calibration of dynamic performance of piezoelectric micromotor

Zhoumo Zeng; Ming Yang; Xueyou Yang; Jiazi Sun

doi:10.1117/12.276621

19 June 1997 Measurement and calibration of dynamic performance of piezoelectric micromotor

Zhoumo Zeng, Ming Yang, Xueyou Yang, Jiazi Sun

Proceedings Volume 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.276621
Event: Smart Structures and Materials '97, 1997, San Diego, CA, United States

Abstract

Piezoelectric micromotor, as one kind of the mainly actuator in Micro Electro Mechanical Systems, has been paid a great deal of attention to. This paper offers an idea of measuring the dynamic performance of a piezoelectric micromotor by means of Laser Doppler Avemometry. Based on the idea, the transient response and influence of some factors of an around travelling wave ultra motor are inspected.

Citation Download Citation

Zhoumo Zeng, Ming Yang, Xueyou Yang, and Jiazi Sun "Measurement and calibration of dynamic performance of piezoelectric micromotor", Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); https://doi.org/10.1117/12.276621

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