Microfabricated biaxial electrostatic torsional scanning mirror

David L. Dickensheets; Gordon S. Kino

doi:10.1117/12.271223

15 April 1997 Microfabricated biaxial electrostatic torsional scanning mirror

Proceedings Volume 3009, Micromachining and Imaging; (1997) https://doi.org/10.1117/12.271223
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We describe the design, fabrication and characterization of a biaxial torsional scanning mirror for use in a microfabricated confocal optical microscope. The mirror, fabricated using wafer bonding and surface micromachining techniques, is a gimbal structure consisting of a silicon plate, measuring 500 micrometers X 500 micrometers X 25 micrometers , which is suspended in a silicon frame by silicon nitride hinges. It is actuated electrostatically, and is capable of raster scanning with a line scan frequency of 2.7 kHz and with a scan range of +/- 1.5 degree(s) about both orthogonal axes. Both resonant and non-resonant scanning are discussed. Sample images acquired with a frame rate of 10 Hz using a microfabricated microscope with the biaxial scanning mirror are presented.

Citation Download Citation

David L. Dickensheets and Gordon S. Kino "Microfabricated biaxial electrostatic torsional scanning mirror", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); https://doi.org/10.1117/12.271223

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