Focusing properties of a micromachined electron lens

David A. Crewe; Marvin M. Ruffin; Alan D. Feinerman

doi:10.1117/12.271218

15 April 1997 Focusing properties of a micromachined electron lens

David A. Crewe, Marvin M. Ruffin, Alan D. Feinerman

Proceedings Volume 3009, Micromachining and Imaging; (1997) https://doi.org/10.1117/12.271218
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The probe forming capability of a microfabricated silicon electrostatic electron lens is under investigation. The lens measures 7 mm by 9 mm by 1.64 mm and consists of three silicon electrodes separated by Pyrex optical fibers. A test structure was designed to house the micromachined lens and a commercially available electron emitter as well as deflectors and an electron detector. Images of a 1000 mesh gold TEM wire grid at a working distance of 4 mm are being obtained at magnifications greater than 10,000 X. Data from the images will be analyzed to estimate the quality of the electron beam.

Citation Download Citation

David A. Crewe, Marvin M. Ruffin, and Alan D. Feinerman "Focusing properties of a micromachined electron lens", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); https://doi.org/10.1117/12.271218

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