Er-doped fluoride glass films by MOCVD for waveguide devices

Chia-Yen Li; Vladimir Fuflyigin; Jing Zhao; Xuesheng Chen; Seppo Honkanen; Nasser Peyghambarian

doi:10.1117/12.271145

2 May 1997 Er-doped fluoride glass films by MOCVD for waveguide devices

Chia-Yen Li, Vladimir Fuflyigin, Jing Zhao, Xuesheng Chen, Seppo Honkanen, Nasser Peyghambarian

Proceedings Volume 2996, Rare-Earth-Doped Devices; (1997) https://doi.org/10.1117/12.271145
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We report on the growth of erbium doped ZrF₄-LaF₃- BaF₂ glass films by metalorganic chemical vapor deposition (MOCVD) for the construction of planar waveguide devices. Our process provides the growth of high quality, uniform in thickness, and continuous films on a wide variety of common substrates. A protective layer of MgF₂ was deposited in-situ onto the Er-doped glass films under the same CVD deposition conditions. The luminescence of Er around 1.55 micrometers was observed in films on all the substrates used. The emission line shapes are the same as those observed from Er-doped fluorozirconate glass. MOCVD proved to be a feasible technology to grow rare-earth doped fluoride films for planar waveguide devices.

Citation Download Citation

Chia-Yen Li, Vladimir Fuflyigin, Jing Zhao, Xuesheng Chen, Seppo Honkanen, and Nasser Peyghambarian "Er-doped fluoride glass films by MOCVD for waveguide devices", Proc. SPIE 2996, Rare-Earth-Doped Devices, (2 May 1997); https://doi.org/10.1117/12.271145

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available