Rapid fabrication of diffractive optical elements by excimer laser micromachining

Michael T. Duignan; Gregory P. Behrmann

doi:10.1117/12.273723

9 May 1997 Rapid fabrication of diffractive optical elements by excimer laser micromachining

Michael T. Duignan, Gregory P. Behrmann

Proceedings Volume 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II; (1997) https://doi.org/10.1117/12.273723
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We describe the rapid fabrication of binary, multilevel, and blazed diffractive optical elements, using a tabletop excimer laser micromachining workstation and optical surface profiler. Functional DOEs are produced in minutes to hours in polymer films. We also show that laser-machined polymer DOEs can be transferred to fused silica by reactive ion etching.

Citation Download Citation

Michael T. Duignan and Gregory P. Behrmann "Rapid fabrication of diffractive optical elements by excimer laser micromachining", Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); https://doi.org/10.1117/12.273723

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