Preparation of Y3Fe5O12 and Mn-Zn ferrite thin films by excimer laser ablation

Peter A. Atanasov; Mihaela E. Koleva; Rumen I. Tomov

doi:10.1117/12.273737

9 May 1997 Preparation of Y3Fe5O12 and Mn-Zn ferrite thin films by excimer laser ablation

Peter A. Atanasov, Mihaela E. Koleva, Rumen I. Tomov

Proceedings Volume 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II; (1997) https://doi.org/10.1117/12.273737
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The possibility of using the pulsed laser deposition technique to produce garnet (Y₃Fe₅O₁₂) and ferrite (Mn_{1- x}Zn_xFe₂O₄) thin films of high quality on different substrates (poly-Al₂O₃, poly-AlN, sapphire) is explored. The properties of thin films prepared by excimer laser ablation of stoichiometric non-sintered (Y₃Fe₅O₁₂) and sintered (Mn_1-xZn_xFe₂O₄) ceramic targets are performed. The stoichiometrical transfer from targets to substrates, as well as synthesis of YIG phase in the case of ablation of non-sintered Y₃Fe₅O₁₂ target is achieved. The magnetic measurements in two in-plane perpendicular each to other directions are carried out. The hysteresis loops observed show evidence of anisotropy which depends on the crystal structure of substrates. The typical values of coercive force and saturation magnetization measured appear to be comparable to those of more thick films. The films are characterized by VSM and XPS analyses.

Citation Download Citation

Peter A. Atanasov, Mihaela E. Koleva, and Rumen I. Tomov "Preparation of Y3Fe5O12 and Mn-Zn ferrite thin films by excimer laser ablation", Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); https://doi.org/10.1117/12.273737

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