Design of resonant device using microelectromechanical comb structure

Ai Qun Liu; Y. S. Chua

doi:10.1117/12.269797

20 March 1997 Design of resonant device using microelectromechanical comb structure

Ai Qun Liu, Y. S. Chua

Proceedings Volume 2921, International Conference on Experimental Mechanics: Advances and Applications; (1997) https://doi.org/10.1117/12.269797
Event: International Conference on Experimental Mechanics: Advances and Applications, 1996, Singapore, Singapore

Abstract

The comb structure is a popular microstructure used in microelectromechanical devices. As a result, it is essential to understand the physics of the comb structure by understanding the levitating force associated with the comb structure. The design of the comb structure can be optimized by minimizing resonator friction and maximizing harmonic work per cycle. The comb structure is fabricated using the high aspect ratio process so as to produce stiffer comb fingers as well as to increase the capacitance between the comb fingers.

Citation Download Citation

Ai Qun Liu and Y. S. Chua "Design of resonant device using microelectromechanical comb structure", Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); https://doi.org/10.1117/12.269797

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