Paper
24 September 1996 Blue light emission from hydrogenated amorphous silicon carbide produced by organic source
Jun Xu, Kun-Ji Chen, Tianfu Ma, Jia Fang Du, Xinfan Huang, Wei Li, Duan Feng
Author Affiliations +
Proceedings Volume 2886, Semiconductor Lasers II; (1996) https://doi.org/10.1117/12.251894
Event: Photonics China '96, 1996, Beijing, China
Abstract
Hydrogenated amorphous silicon carbide alloys were produced by using organic carbon source, xylene, instead of generally used methane. It was found that the optical band gap of present samples is significantly increased and reaches as high as 3.1eV with increasing the xylene gas fraction to 80 percent. The film configuration was also investigated and it was shown that there exist a lot of aromatic rings in the film network. An intense blue light emission has been observed from the present samples. The luminescence wavelength is peaked in the range of 490nm to 610nm, the origin of the light emission is briefly discussed in this paper.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Xu, Kun-Ji Chen, Tianfu Ma, Jia Fang Du, Xinfan Huang, Wei Li, and Duan Feng "Blue light emission from hydrogenated amorphous silicon carbide produced by organic source", Proc. SPIE 2886, Semiconductor Lasers II, (24 September 1996); https://doi.org/10.1117/12.251894
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KEYWORDS
Carbon

Amorphous silicon

Light

Luminescence

Methane

Plasma enhanced chemical vapor deposition

Silicon

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