Semiconductor surface superlattice symmetry type evaluation

Yuri Kornienko; Alexander P. Fedtchouk; Ruslana A. Rudenko

doi:10.1117/12.250940

13 September 1996 Semiconductor surface superlattice symmetry type evaluation

Yuri Kornienko, Alexander P. Fedtchouk, Ruslana A. Rudenko

Proceedings Volume 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III; (1996) https://doi.org/10.1117/12.250940
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

We have constructed the automated complex oriented to the semiconductor wafer surface superlattice symmetry type evaluation. The basis of the method is the photo-e.m.f. signal registration as a function of the rotation angle of the upper transparent electrode. The main part of the apparatus is the molecular dipole probe being characterized by the value of the surface monolayer charge which in turn depends on the wafer surface micro curvature (atomic rows energetic relief). As the result of the present work the interdependence between the number of light director orientation axes and surface atoms coordination type which is, at the same time, the symmetry of the superlattice.

Citation Download Citation

Yuri Kornienko, Alexander P. Fedtchouk, and Ruslana A. Rudenko "Semiconductor surface superlattice symmetry type evaluation", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); https://doi.org/10.1117/12.250940

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available