Retardation-modulated differential interference microscope and its application to 3D shape measurement

Hiroshi Ishiwata; Masahide Itoh; Toyohiko Yatagai

doi:10.1117/12.246219

16 August 1996 Retardation-modulated differential interference microscope and its application to 3D shape measurement

Hiroshi Ishiwata, Masahide Itoh, Toyohiko Yatagai

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246219
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

The retardation modulated DIC is proposed for extracting phase information from a DIC image by analyzing the partial coherent theory, which is applied to DIC image enhancement and phase information extraction.

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Hiroshi Ishiwata, Masahide Itoh, and Toyohiko Yatagai "Retardation-modulated differential interference microscope and its application to 3D shape measurement", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246219

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