Birefringence-sensitive interference microscope

Kallol Bhattacharya

doi:10.1117/12.246187

16 August 1996 Birefringence-sensitive interference microscope

Kallol Bhattacharya

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246187
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

Measurement and analysis of birefringence distribution in samples such as silicon wafers, electro-optic crystals and some biological specimens often poses a challenging task. Most of the standard methods for photoelastic analysis are not exactly suited to testing of samples having microscopic dimensions. The present paper proposes an interference microscopic technique where, unlike conventional interference microscopy, both the interference beams are derived from the light transmitted through the sample. As a consequence of this, the surface finish of the sample need not be of the optical order and thickness variations in the sample are not reflected in the results.

Citation Download Citation

Kallol Bhattacharya "Birefringence-sensitive interference microscope", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246187

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