Automated spectroscopic ellipsometry for characterization of complex multilayers for 550x650x0.7-mm LCD production control

Dorian Zahorski; Jean-Louis P. Stehle; Jean-Philippe Piel; Jean Pierre Rey; L. Escadafals; Akira Iwasaki; Y. Kamiyama

doi:10.1117/12.246201

16 August 1996 Automated spectroscopic ellipsometry for characterization of complex multilayers for 550x650x0.7-mm LCD production control

Dorian Zahorski, Jean-Louis P. Stehle, Jean-Philippe Piel, Jean Pierre Rey, L. Escadafals, Akira Iwasaki, Y. Kamiyama

Author Affiliations +

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246201
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

LCD production requires the deposition of complex multilayer systems on large area glass panels. The control of the different steps of the process must be made as accurately as possible not only in term of layer thickness but also in term of layer quality in some cases. The multilayer monitor especially developed by SOPRA for flat panel display (MLLM- FPDD) will be described in details in the proposed paper. The instrument is based on spectroscopic ellipsometry which is a non destructive technique. The rear face contribution is mechanically removed and no preparation of the screens is needed. We can determined not only the optical indices of the layers (scanning mode) but also can make rapidly mapping measurement on the entire surface of the panels to control the homogeneity of the layer and the run to run stability. Practical examples obtained in the field of LCD technology will be described and discussed including throughput for nine points and six parameters on patterned panels.

Citation Download Citation

Dorian Zahorski, Jean-Louis P. Stehle, Jean-Philippe Piel, Jean Pierre Rey, L. Escadafals, Akira Iwasaki, and Y. Kamiyama "Automated spectroscopic ellipsometry for characterization of complex multilayers for 550x650x0.7-mm LCD production control", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246201

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available