Application of phase-sensitive optical system for soft defect detection

Tsuneyuki Hagiwara; Kouichirou Komatsu

doi:10.1117/12.245247

24 July 1996 Application of phase-sensitive optical system for soft defect detection

Tsuneyuki Hagiwara, Kouichirou Komatsu

Proceedings Volume 2793, Photomask and X-Ray Mask Technology III; (1996) https://doi.org/10.1117/12.245247
Event: Symposium on Photomask and X-Ray Mask Technology, 1996, Kawasaki City, Japan

Abstract

To attain a better yield, the performance requirements for the inspection equipment have been getting more rigid among mask manufacturers. Recently, we have developed the operational principle of the phase sensitive optical system based on the differential interference contrast (DIC) technique. This optical system has capability to suppress the circuit pattern images, and can enhance the contrast between the images of the contamination and the defect-less circuit patterns.

Citation Download Citation

Tsuneyuki Hagiwara and Kouichirou Komatsu "Application of phase-sensitive optical system for soft defect detection", Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); https://doi.org/10.1117/12.245247

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